中文

Journal of Shanghai University（Natural Science Edition） ›› 2010, Vol. 16 ›› Issue (4): 371-375.

• Communication and Information • Previous Articles     Next Articles

Ellipsometry for Measurement of Complex Permittivity of Materials in MillimeterWave Band

LI Su-ping1,WANG Zi-hua1,ZHANG You-jun2,ZHANG Sheng1,LI Ming-xiang3,LI Ying1   

  1. (1. School of Communication and Information Engineering, Shanghai University, Shanghai 200072, China;
    2. School of Information Engineering, Shanghai Maritime University, Shanghai 200135, China;
     3. Institute of Electronic Physics, Shanghai University, Shanghai 201800, China)
  • Received:2009-03-09 Online:2010-08-30 Published:2010-08-30

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Abstract:

 The electromagnetic frequency band of ellipsometry is extended from visible light and infrared band to millimeterwave band. We analyze the measurement principle of ellipsometry in millimeterwave band, and carry out experiments using a selfbuilt measurement apparatus. From the measured results, an appropriate incident angle is chosen. We obtain complex permittivity of materials based on a large amount of measured data.

Key words:  complex permittivity; ellipsometry; reflection coefficient; millimeterwave

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