The present paper is devoted to the study of Rayleigh wave propagation in a homogeneous, transversely isotropic, thermoelastic diffusive half-space, subject to stress free, thermally insulated/isothermal, and chemical potential boundary conditions in the context of the generalized thermoelastic diffusion theory. The Green-Lindsay(GL) theory is used in the study. In this theory, thermodiffusion and thermodiffusion mechanical relaxations are governed by four different time constants. Secular equations for surface wave propagation in the considered media are derived. Anisotropy and diffusion effects on the phase velocity, attenuation coefficient are graphically presented in order to present the analytical results and make comparison. Some special cases of frequency equations are derived from the present investigation.