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Novel mode-coupling vibrations of AlN thin film bulk acoustic resonator operating with thickness-extensional mode
Zinan ZHAO, Nian LI, Yilin QU, Weiqiu CHEN
Novel mode-coupling vibrations of AlN thin film bulk acoustic resonator operating with thickness-extensional mode
Zinan ZHAO, Nian LI, Yilin QU, Weiqiu CHEN
Applied Mathematics and Mechanics (English Edition) . 2023, (12): 2187 -2206 .  DOI: 10.1007/s10483-023-3056-6

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