Novel mode-coupling vibrations of AlN thin film bulk acoustic resonator operating with thickness-extensional mode

doi:10.1007/s10483-023-3056-6

Applied Mathematics and Mechanics (English Edition) ›› 2023, Vol. 44 ›› Issue (12): 2187-2206.doi: https://doi.org/10.1007/s10483-023-3056-6

Novel mode-coupling vibrations of AlN thin film bulk acoustic resonator operating with thickness-extensional mode

Zinan ZHAO^1,2, Nian LI³, Yilin QU⁴, Weiqiu CHEN^1,2

1. Key Laboratory of Soft Machines and Smart Devices of Zhejiang Province and Department of Engineering Mechanics, Zhejiang University, Hangzhou 310027, China;
2. Huanjiang Laboratory, Zhuji 311816, Zhejiang Province, China;
3. Suzhou HunterSun Electronics Co., Ltd., Suzhou 215124, Jiangsu Province, China;
4. School of Marine Science and Technology, Northwestern Polytechnical University, Xi'an 710072, China

收稿日期:2023-07-25 修回日期:2023-09-07 发布日期:2023-11-27
通讯作者: Weiqiu CHEN, E-mail: chenwq@zju.edu.cn
基金资助:
the National Natural Science Foundation of China (Nos. 11872329, 12192211, and 12072315), the Natural Science Foundation of Zhejiang Province of China (No. LD21A020001), the National Postdoctoral Program for Innovation Talents of China (No. BX2021261), and the China Postdoctoral Science Foundation Funded Project (No. 2022M722745)

Novel mode-coupling vibrations of AlN thin film bulk acoustic resonator operating with thickness-extensional mode

Zinan ZHAO^1,2, Nian LI³, Yilin QU⁴, Weiqiu CHEN^1,2

1. Key Laboratory of Soft Machines and Smart Devices of Zhejiang Province and Department of Engineering Mechanics, Zhejiang University, Hangzhou 310027, China;
2. Huanjiang Laboratory, Zhuji 311816, Zhejiang Province, China;
3. Suzhou HunterSun Electronics Co., Ltd., Suzhou 215124, Jiangsu Province, China;
4. School of Marine Science and Technology, Northwestern Polytechnical University, Xi'an 710072, China

Received:2023-07-25 Revised:2023-09-07 Published:2023-11-27
Contact: Weiqiu CHEN, E-mail: chenwq@zju.edu.cn
Supported by:
the National Natural Science Foundation of China (Nos. 11872329, 12192211, and 12072315), the Natural Science Foundation of Zhejiang Province of China (No. LD21A020001), the National Postdoctoral Program for Innovation Talents of China (No. BX2021261), and the China Postdoctoral Science Foundation Funded Project (No. 2022M722745)

摘要/Abstract

摘要： The dispersion curves of bulk waves propagating in both AlN and ZnO film bulk acoustic resonators (FBARs) are presented to illustrate the mode flip of the thickness-extensional (TE) and 2nd thickness-shear (TSh2) modes. The frequency spectrum quantitative prediction (FSQP) method is used to solve the frequency spectra for predicting the coupling strength among the eigen-modes in AlN and ZnO FBARs. The results elaborate that the flip of the TE and TSh2 branches results in novel self-coupling vibration between the small-wavenumber TE and large-wavenumber TE modes, which has never been observed in the ZnO FBAR. Besides, the mode flip leads to the change in the relative positions of the frequency spectral curves about the TE cut-off frequency. The obtained frequency spectra can be used to predict the mode-coupling behaviors of the vibration modes in the AlN FBAR. The conclusions drawn from the results can help to distinguish the desirable operation modes of the AlN FBAR with very weak coupling strength from all vibration modes.

关键词: AlN film, mode flip, frequency spectrum quantitative prediction (FSQP), dispersion curve, mode-coupling vibration

Abstract: The dispersion curves of bulk waves propagating in both AlN and ZnO film bulk acoustic resonators (FBARs) are presented to illustrate the mode flip of the thickness-extensional (TE) and 2nd thickness-shear (TSh2) modes. The frequency spectrum quantitative prediction (FSQP) method is used to solve the frequency spectra for predicting the coupling strength among the eigen-modes in AlN and ZnO FBARs. The results elaborate that the flip of the TE and TSh2 branches results in novel self-coupling vibration between the small-wavenumber TE and large-wavenumber TE modes, which has never been observed in the ZnO FBAR. Besides, the mode flip leads to the change in the relative positions of the frequency spectral curves about the TE cut-off frequency. The obtained frequency spectra can be used to predict the mode-coupling behaviors of the vibration modes in the AlN FBAR. The conclusions drawn from the results can help to distinguish the desirable operation modes of the AlN FBAR with very weak coupling strength from all vibration modes.

Key words: AlN film, mode flip, frequency spectrum quantitative prediction (FSQP), dispersion curve, mode-coupling vibration

中图分类号:

74H45

Zinan ZHAO, Nian LI, Yilin QU, Weiqiu CHEN. Novel mode-coupling vibrations of AlN thin film bulk acoustic resonator operating with thickness-extensional mode[J]. Applied Mathematics and Mechanics (English Edition), 2023, 44(12): 2187-2206.

参考文献

[1] GRUDKOWSKI, T., BLACK, J., REEDER, T., CULLEN, D., and WAGNER, R. Fundamentalmode VHF/UHF minature acoustic resonators and filters on silicon. Applied Physics Letters, 37(11), 993–995(1980)
[2] LAKIN, K. and WANG, J. Acoustic bulk wave composite resonators. Applied Physics Letter, 38(3), 125–127(1981)
[3] NAKAMURA, K., SASAKI, H., and SHIMIZU, H. ZnO/SiO₂-diaphragm composite resonator on a silicon wafer. Electronics Letters, 17(14), 507–509(1981)
[4] GILL, G. S. and PRASAD, M. Development of film bulk acoustic wave resonator: a review. Sensor Letters, 14(4), 346–361(2016)
[5] NAN, T. X., LIN, H., GAO, Y., MATYUSHOV, A., YU, G. L., CHEN, H. H., SUN, N., WEI, S. J., WANG, Z. G., LI, M. H., WANG, X. J., BELKESSAM, A., GUO, R. D., CHEN, B., ZHOU, J., QIAN, Z. Y., HUI, Y., RINALDI, M., MCCONNEY, M. E., HOWE, B. M., HU, Z. Q., JONES, J. G., BROWN, G. J., and SUN, N. X. Acoustically actuated ultra-compact NEMS magnetoelectric antennas. Nature Communications, 8, 296(2017)
[6] GAO, J. N., LIU, G. R., LI, J., and LI, G. Q. Recent developments of film bulk acoustic resonators. Functional Materials Letters, 9(3), 1630002(2016)
[7] MUJAHID, A., AFZAL, A., and DICKERT, F. L. An overview of high frequency acoustic sensorsQCMs, SAWs and FBARs-chemical and biochemical applications. Sensors, 19(20), 4395(2019)
[8] ZHANG, Y. and CHEN, D. Multilayer Integrated Film Bulk Acoustic Resonators, Springer Science & Business Media, Heidelberg, 5–12(2012)
[9] GONG, X., HAN, M., SHANG, X., XIONG, J., DUAN, J., and SEKIMOTO, H. Two-dimensional analysis of spurious modes in aluminum nitride film resonators. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 54(6), 1171–1176(2007)
[10] ZHU, F., QIAN, Z., and WANG, B. Wave propagation in piezoelectric layered structures of film bulk acoustic resonators. Ultrasonics, 67, 105–111(2016)
[11] LI, N., QIAN, Z., and YANG, J. Two-dimensional equations for piezoelectric thin-film acoustic wave resonators. International Journal of Solids and Structures, 110, 170–177(2017)
[12] HE, H., YANG, J., ZHANG, W., and WANG, J. Effects of mode coupling on the admittance of an at-cut quartz thickness-shear resonator. Chinese Physics B, 22(4), 047702(2013)
[13] LIU, B., JIANG, Q., HU, Y., and YANG, J. High-frequency vibrations of piezoelectric plates driven by lateral electric fields. International Journal of Engineering Science, 49(12), 1435–1442(2011)
[14] ZHAO, Z., PANG, X., QIAN, Z., KUZNETSOVA, I., MA, T., and YONG, Y. K. Lateral sizedependence in UHF mode-coupled ZnO FBARs to suppress undesirable eigenmodes and weaken mounting effect. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 67(8), 1647–1655(2020)
[15] LI, N., QIAN, Z., and YANG, J. Effects of aspect ratio on the mode couplings of thin-film bulk acoustic wave resonators. AIP Advances, 7(5), 055113(2017)
[16] LI, N., WANG, B., and QIAN, Z. Effects of mode couplings on the vibration characteristics of partially electroded thin-film bulk acoustic wave resonators. AIP Advances, 9(6), 065203(2019)
[17] LI, N., WANG, B., and QIAN, Z. Suppression of spurious lateral modes and undesired coupling modes in frame-like FBARs by 2-D theory. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 67(1), 180–190(2019)
[18] HUANG, H., LI, N., WANG, B., QIAN, Z., HUANG, B., MA, T., and KUZNETSOVA, I. Twodimensional coupling vibration analysis of laterally acoustically coupled two-port thin-film bulk acoustic resonators. Acta Mechanica Solida Sinica, 33(4), 464–478(2020)
[19] ZHAO, Z., WANG, B., QIAN, Z., and YONG, Y. K. A novel approach to quantitative predictions of high-frequency coupled vibrations in layered piezoelectric plates. International Journal of Engineering Science, 157, 103407(2020)
[20] ZHAO, Z., WANG, B., ZHU, J., and QIAN, Z. Mode couplings in high-frequency thicknessextensional vibrations of ZnO thin film resonator based on weak boundary condition. International Journal of Mechanical Sciences, 148, 223–230(2018)
[21] ZHAO, Z. and CHEN, W. Investigation on high-frequency and mode-coupling vibrations in thickness-extensional piezoelectric thin-film resonators with initial stress. Applied Mathematical Modelling, 112, 78–90(2022)
[22] ZHAO, Z., WANG, B., QIAN, Z., KUZNETSOVA, I., MA, T., and YONG, Y. K. Design considerations for frequency shifts in a laterally finite FBAR sensor in contact with the newtonian liquid. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 67(11), 2402– 2412(2020)
[23] RUBY, R. A snapshot in time: the future in filters for cell phones. IEEE Microwave Magazine, 16(7), 46–59(2015)
[24] LIU, Y., CAI, Y., ZHANG, Y., TOVSTOPYAT, A., LIU, S., and SUN, C. Materials, design, and characteristics of bulk acoustic wave resonator: a review. Micromachines, 11(7), 630(2020)
[25] ZHANG, Z., LIANG, J., ZHANG, D., PANG, W., and ZHANG, H. A novel bulk acoustic wave resonator for filters and sensors applications. Micromachines, 6(9), 1306–1316(2015)
[26] FATTINGER, G. G., MARKSTEINER, S., KAITILA, J., and AIGNER, R. Optimization of acoustic dispersion for high performance thin film BAW resonators. 2005 IEEE Ultrasonics Symposium, IEEE, Netherlands, 1175–1178(2005)
[27] HASHIMOTO, K. Y. RF Bulk Acoustic Wave Filters for Communications, Artech House, Boston, 67–70(2009)
[28] JOSE, S., HUETING, R., and JANSMAN, A. On the rule of thumb for flipping the dispersion relation in baw devices. 2011 IEEE International Ultrasonics Symposium, IEEE, Orlando, 1712– 1715(2011)
[29] ZHU, F., WANG, B., and QIAN, Z. A numerical algorithm to solve multivariate transcendental equation sets in complex domain and its application in wave dispersion curve characterization. Acta Mechanica, 230, 1303–1321(2019)
[30] ZHU, F., QU, Y., and PAN, E. A new model for acoustic attenuation of GHz waveguide induced by metal electrodes in piezoelectric composites. International Journal of Mechanical Sciences, 231, 107564(2022)
[31] QIN, L., CHEN, Q., CHENG, H., CHEN, Q., LI, J. F., and WANG, Q. M. Viscosity sensor using ZnO and AlN thin film bulk acoustic resonators with tilted polar c-axis orientations. Journal of Applied Physics, 110, 094511(2011)
[32] AULD B. A. Acoustic Fields and Waves in Solids, John Wiley & Sons, New York, 357–382(1973)
[33] ZHAO, Z. and CHEN, W. Predictions of dynamic multimode-coupling and high-frequency vibrations in magneto-electro-elastic heterostructures. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 69(5), 1804–1814(2022)

Novel mode-coupling vibrations of AlN thin film bulk acoustic resonator operating with thickness-extensional mode

Novel mode-coupling vibrations of AlN thin film bulk acoustic resonator operating with thickness-extensional mode

RichHTML

PDF

可视化

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 1

编辑推荐

Metrics

本文评价