Analysis of thickness-shear and thickness-twist modes of AT-cut quartz acoustic wave resonator and filter

doi:10.1007/s10483-015-2008-6

Applied Mathematics and Mechanics (English Edition) ›› 2015, Vol. 36 ›› Issue (12): 1527-1538.doi: https://doi.org/10.1007/s10483-015-2008-6

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Analysis of thickness-shear and thickness-twist modes of AT-cut quartz acoustic wave resonator and filter

Zinan ZHAO¹, Zhenghua QIAN¹, Bin WANG¹, Jiashi YANG²

1. State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China;
2. Department of Mechanical and Materials Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588-0526, U. S. A

Received:2015-04-16 Revised:2015-06-29 Online:2015-12-01 Published:2015-12-01
Contact: Zhenghua QIAN E-mail:qianzh@nuaa.edu.cn
Supported by:
Project supported by the Program for New Century Excellent Talents in Universities of the Ministry of Education of China(No. NCET-12-0625), the National Natural Science Foundation of China(Nos. 11232007 and 11502108), the Science Foundation for Distinguished Young Scholars of Jiangsu Province(No. SBK2014010134), the Fundamental Research Funds for the Central Universities(Nos. NE2013101 and NZ2013307), and a project funded by the Priority Academic Program Development of Jiangsu Higher Education Institutions(PAPD)

Abstract

Abstract: The thickness-shear(TS) and thickness-twist(TT) vibrations of partially electroded AT-cut quartz plates for acoustic wave resonator and filter applications are theoretically studied. The plates have structural variations in one of the two in-plane directions of the plates only. The scalar differential equations derived by Tiersten and Smythe for electroded and unelectroded AT-cut quartz plates are used, resulting in free vibration resonant frequencies and mode shapes for both fundamental and overtone families of modes. The trapped modes with vibrations, mainly confined in the electroded areas, are found to exist in both the resonator and the filter structures. The numerical results for the trapped modes are presented for different aspect ratios of electrodes and material properties, providing a reference to the design and optimization of quartz acoustic wave resonators and filters.

Key words: thickness-twist(TT), quartz plate, scalar equation, thickness-shear(TS), trapped mode

2010 MSC Number:

O347.4⁺3

Zinan ZHAO, Zhenghua QIAN, Bin WANG, Jiashi YANG. Analysis of thickness-shear and thickness-twist modes of AT-cut quartz acoustic wave resonator and filter. Applied Mathematics and Mechanics (English Edition), 2015, 36(12): 1527-1538.

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References

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Analysis of thickness-shear and thickness-twist modes of AT-cut quartz acoustic wave resonator and filter

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