Abstract: Boundary constraint induced inhomogeneous effects are important for mechanical responses of nano/micro-devices. For microcantilever sensors, the clamped-end constraint induced inhomogeneous effect of static deformation, so called the clamped-end effect, has great influence on the detection signals. This paper is devoted to developing an alternative mechanical model to characterize the clamped-end effect on the static detection signals of the DNA-microcantilever. Different from the previous concentrated load models, the DNA adsorption is taken as an equivalent uniformly distributed tangential load on the substrate upper surface, which exactly satisfies the zero force boundary condition at the free-end. Thereout, a variable coefficient differential governing equation describing the non-uniform deformation of the DNA-microcantilever induced by the clamped-end constraint is established by using the principle of minimum potential energy. By reducing the order of the governing equation, the analytical solutions of the curvature distribution and static bending deflection are obtained. By comparing with the previous approximate surface stress models, the clamped-end effect on the static deflection signals is discussed, and the importance of the neutral axis shift effect is also illustrated for the asymmetric laminated microcantilever.

Key words: surface stress, DNA adsorption, microcantilever biosensor, static deflection, clamped-end effect, non-uniform deformation