A semi-analytical model and mechanism analysis for force-frequency effect and coefficient of square quartz

Expand
  • 1.TXC-NBU Joint Center of Research, Piezoelectric Device Laboratory, School of Mechanical Engineering and Mechanics, Ningbo University, Ningbo 315211, Zhejiang Province, China
    2.Key Laboratory Impact and Safety Engineering, Ministry of Education, Ningbo University, Ningbo 315211, Zhejiang Province, China
    3.State Key Laboratory for Strength and Vibration of Mechanical Structures, School of Aerospace Engineering, Xi'an Jiaotong University, Xi'an 710049, China
    4.TXC (Ningbo) Corporation, Ningbo 315800, Zhejiang Province, China
Lijun YI, E-mail: yilijun@nbu.edu.cn

Received date: 2024-11-07

  Revised date: 2025-03-27

  Online published: 2025-06-06

Supported by

Project supported by the Ningbo Youth Science and Technology Innovation Leading Talents Project of China (No. 2023QL020), the Ningbo Science and Technology Major Project of China (No. 2022Z015), and the K. C. Wong Magana Fund through Ningbo University

Copyright

©Shanghai University 2025

Abstract

This study presents a closed-form solution for central stress, a semi-analytical model, and a modified anisotropic semi-analytical model to efficiently calculate the force-frequency coefficients (FFCs) of square quartz crystal resonators (QCRs) with different side lengths and azimuth angles under eccentrically concentrated and distributed loads. The semi-analytical model is validated by comparisons between the experimental results and the nonlinear finite element method (FEM) simulation results. Based on the semi-analytical model for the FFC and nonlinear FEM simulations, the FFC variations of square QCRs under external loads and the related mechanisms are investigated. Among the initial stresses caused by external loads, the central stress parallel to the x-crystallographic axis is the primary factor influencing the FFC of quartz. Our findings can provide practical tools for calculating the FFC, and help the design and development of square quartz force sensors.

Cite this article

Lixia MA, Qiang ZHOU, Lijun YI, Ji WANG . A semi-analytical model and mechanism analysis for force-frequency effect and coefficient of square quartz[J]. Applied Mathematics and Mechanics, 2025 , 46(6) : 1089 -1106 . DOI: 10.1007/s10483-025-3255-6

References

[1] KIM, J., CAMPBELL, A. S., DE áVILA, B. E. F., and WANG, J. Wearable biosensors for healthcare monitoring. Nature Biotechnology, 37, 389–406 (2019)
[2] OLSSON, T., HAAGE, M., KIHLMAN, H., JOHANSSON, R., NILSSON, K., ROBERTSSON, A., BJ?RKMAN, M., ISAKSSON, R., OSSBAHR, G., and BROG?RDH, T. Cost-efficient drilling using industrial robots with high-bandwidth force feedback. Robotics and Computer-Integrated Manufacturing, 26, 24–38 (2010)
[3] LOU, Y. J., WEI, J. H., and SONG, S. Design and optimization of a joint torque sensor for robot collision detection. IEEE Sensors Journal, 19, 6618–6627 (2019)
[4] HAN, X., HUANG, M., WU, Z., GAO, Y., XIA, Y., YANG, P., FAN, S., LU, X., YANG, X., LIANG, L., L., SU, W., WANG, L., CUI, Z., ZHAO, Y., LI, Z., ZHAO, L., and JIANG, Z. Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging. Microsystems & Nanoengineering, 9, 156 (2023)
[5] XIE, J. and HU, Y. Electric admittance analysis of quartz crystal resonator in thickness-shear mode induced by array of surface viscoelastic micro-beams. Applied Mathematics and Mechanics (English Edition), 38(1), 29–38 (2017) https://doi.org/10.1007/s10483-017-2154-6
[6] LIU, Q., WANG, S., YAN, G., DING, H., WANG, H., SHI, Q., DING, X., and YU, H. A human-sensitive frequency band vibration isolator for heavy-duty truck seats. Applied Mathematics and Mechanics (English Edition), 45(10), 1733–1748 (2024) https://doi.org/10.1007/s10483-024-3177-8
[7] KONG, J., DING, B., WANG, W., WANG, Z., XIAO, J., and QIU, H. An electromagnetic semi-active dynamic vibration absorber for thin-walled workpiece vibration suppression in mirror milling. Applied Mathematics and Mechanics (English Edition), 45(8), 1315–1334 (2024) https://doi.org/10.1007/s10483-024-3132-7
[8] LAN, B. Y., TIAN, W. J., ZHAO, Q. J., and LV, Y. S. Study on the design and the stability of integrated quartz resonator. Advanced Materials Research, 846-847, 569–573 (2013)
[9] EERNISSE, E. P., WARD, R. W., and WIGGINS, R. B. Survey of quartz bulk resonator sensor technologies. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 35, 323–330 (1988)
[10] CHEN, J., YONG, Y. K., KUBENA, R., KIRBY, D., and CHANG, D. On the acceleration sensitivity and its active reduction by edge electrodes in AT-cut quartz resonators. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 62, 1104–1113 (2015)
[11] CHEN, J. F. Nonlinear Acceleration Sensitivity and Frequency Temperature Behavior of Quartz Crystals, Ph. D. dissertation, Rutgers University (2016)
[12] EERNISSE, E. P. and WIGGINS, R. B. Review of thickness-shear mode quartz resonator sensors for temperature and pressure. IEEE Sensors Journal, 1, 79–87 (2001)
[13] KIRIKERA, G. R., PATTON, W., and BEHR, M. S. Modeling thickness shear mode quartz sensors for increased downhole pressure & temperature applications. Proceedings of the COMSOL Conference, COMSOL, Boston (2010)
[14] HU, Y. T., CUI, Z. J., JIANG, S. N., and YANG, J. S. Thickness-shear vibration of circular crystal plate in cylindrical shell as pressure sensor. Applied Mathematics and Mechanics (English Edition), 27(6), 749–755 (2006) https://doi.org/10.1007/s10483-006-0605-z
[15] CHEN, F., TIAN, W., and WEI, Y. Highly sensitive resonant sensor using quartz resonator cluster for inclination measurement. Review of Scientific Instruments, 91, 055005 (2020)
[16] MUROZAKI, Y., NOGAWA, K., and ARAI, F. Miniaturized load sensor using quartz crystal resonator constructed through microfabrication and bonding. ROBOMECH Journal, 1, 3 (2014)
[17] FU, H., CHEN, C., WANG, C., CHAO, M., ZHOU, Q., YANG, G., and WANG, G. Quartz crystal based sensor head design and analysis for robot torque sensor application. Cobot, 1, 11 (2022)
[18] MUROZAKI, Y., SAKUMA, S., and ARAI, F. Improvement of the measurement range and temperature characteristics of a load sensor using a quartz crystal resonator with all crystal layer components. Sensors, 17, 1067 (2017)
[19] WATANABE, S., MUROZAKI, Y., SUGIURA, H., SATO, Y., HONBE, K., and ARAI, F. Non-invasive biosignals detection for continuous monitoring of a neonate using quartz crystal resonator. Sensors and Actuators A: Physical, 317, 112475 (2021)
[20] MA, L. X., YUAN, J. C., ZHOU, Q., WANG, J., and YI, L. J. Force frequency coefficient of rectangle quartz crystal resonators based load sensor. 2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA), IEEE, Nanjing (2022)
[21] ZHOU, Y. H., CHEN, C. Y., ZHANG, L. C., CHENG, J. G., ZHOU, Q., CHAO, M. C., and WANG, Y. Research on force-frequency coefficient of square quartz crystal with encapsulation body. IEEE Sensors Journal, 23, 13469–13477 (2023)
[22] YANG, G., HUANG, X., TAN, K., CHEN, Q., and PAN, W. Study of force-frequency characteristics in AT-cut strip quartz crystal resonators with different rotation angles. Sensors, 23, 2996 (2023)
[23] MOHAMMADI, M. M. and HAMEDI, M. Force frequency effect in square quartz crystals. AUT Journal of Mechanical Engineering, 5, 215–226 (2021)
[24] NARUMI, K., FUKUDA, T., and ARAI, F. Design and characterization of load sensor with AT-cut QCR for miniaturization and resolution improvement. Journal of Robotics and Mechatronics, 22, 286–292 (2010)
[25] CHEN, F. B., GAO, J. C., and TIAN, W. J. Force-frequency characteristics of multi-electrode quartz crystal resonator cluster. Sensors and Actuators A3: Physical, 269, 427–434 (2018)
[26] WANG, Z. Y., ZHU, H. Z., DONG, Y. G., and FENG, G. P. Development of a high-resolution quartz resonator force and weight sensor with increased reliability. IEEE/ASME Transactions on Mechatronics, 9, 399–406 (2004)
[27] PHAM, T. T., ZHANG, H., YENUGANTI, S., KALUVAN, S., and KOSINSKI, J. A. Design, modeling, and experiment of a piezoelectric pressure sensor based on a thickness-shear-mode crystal resonator. IEEE Transactions on Industrial Electronics, 64, 8484–8491 (2017)
[28] BALLATO, A. D. Effects of initial stress in vibrating quartz plates. Proceedings of the IRE, 48, 261–262 (1960)
[29] JANIAUD, D., NISSIM, L., and GAGNEPAIN, J. Analytical calculation of initial stress effects on anisotropic crystals: application to quartz resonators. 32nd Annual Symposium on Frequency Control, IEEE, New Jersey (1978)
[30] RATAJSKI, J. Force-frequency coefficient of singly rotated vibrating quartz crystals. IBM Journal of Research and Development, 12, 92–99 (1968)
[31] MOHAMMADI, M. M. and HAMEDI, M. Experimental and numerical investigation of force-frequency effect in crystal resonators. Journal of Vibroengineering, 18, 3709–3718 (2016)
[32] GOEL, N. Applications of Micromachined Quartz Resonators for Pressure and Stress Sensing, Ph. D. dissertation, The Pennsylvania State University, 1–169 (2018)
[33] LEE, P. C. Y., WANG, Y. S., and MARKENSCOFF, X. High-frequency vibrations of crystal plates under initial stresses. The Journal of the Acoustical Society of America, 57, 95–105 (1975)
[34] BECHMANN, R. Elastic and piezoelectric constants of alpha-quartz. Physical Review, 110, 1060–1061 (1958)
[35] WANG, J., YU, J. D., YONG, Y. K., and IMAI, T. A finite element analysis of frequency-temperature relations of AT-cut quartz crystal resonators with higher-order Mindlin plate theory. Acta Mechanica, 199, 117–130 (2008)
[36] BAKER, G., PAVLOVI?, M., and TAHAN, N. An exact solution to the two-dimensional elasticity problem with rectangular boundaries under arbitrary edge forces. Philosophical Transactions of the Royal Society of London. Series A: Physical and Engineering Sciences, 343, 307–336 (1993)
[37] MOHAMMADI, M. M., DANESHPAJOOH, H., and HAMEDI, M. Effect of anisotropy and piezoelectricity on the force-frequency coeffcient of AT-cut quartz crystals. Scientia Iranica, 23, 2203–2210 (2016)
[38] NARUMI, K., FUKUDA, T., and ARAI, F. Miniaturization of a wide range load sensor using AT-cut quartz crystal resonator. 2009 International Symposiumon Micro-Nano Mechatronics and Human Science, IEEE, Nagoya (2009)
[39] NARUMI, K., ASAKURA, A., FUKUDA, T., and ARAI, F. Compact force sensor using AT-cut quartz crystal resonator supported by novel retention mechanism. Journal of Robotics and Mechatronics, 21, 260–266 (2009)
[40] LIN, Y., ASAKURA, A., FUKUDA, T., and ARAI, F. Design and fabrication of miniaturized force sensor with quartz crystal resonators. 2007 IEEE/RSJ International Conference on Intelligent Robots and Systems, IEEE, San Diego (2007)
[41] MUROZAKI, Y. and ARAI, F. Wide range load sensor using quartz crystal resonator for detection of biological signals. IEEE Sensors Journal, 15, 1913–1919 (2015)
[42] YUAN, J. C., MA, C., FU, H., ZHOU, Q., and YI, L. J. Analysis of ultimate bearing capacity of quartz crystal based load sensor. 2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA), IEEE, Nanjing (2022)
Outlines

/

APS Journals | CSTAM Journals | AMS Journals | EMS Journals | ASME Journals