Sensitivity analysis of pull-in voltage for RF MEMS switch based on modified couple stress theory

doi:10.1007/s10483-015-2005-6

Applied Mathematics and Mechanics (English Edition) ›› 2015, Vol. 36 ›› Issue (12): 1555-1568.doi: https://doi.org/10.1007/s10483-015-2005-6

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Sensitivity analysis of pull-in voltage for RF MEMS switch based on modified couple stress theory

Junhua ZHU^1,2, Renhuai LIU^1,2,3

1. Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory, Guangzhou 510610, China;
2. China Electronic Product Reliability and Environmental Testing Research Institute, Guangzhou 510610, China;
3. Institute of Applied Mechanics, Jinan University, Guangzhou 510632, China

Received:2014-12-31 Revised:2015-06-12 Online:2015-12-01 Published:2015-12-01
Contact: Junhua ZHU E-mail:zhujh@ceprei.com
Supported by:
Project supported by the National Natural Science Foundation of China(Nos. 51505089 and 61204116), the Opening Project of the Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory(Nos. ZHD201207 and 9140C030605140C03015), and the Pearl River S&T Nova Program of Guangzhou(No. 2014J2200086)

Abstract

Abstract: An approximate analytical model for calculating the pull-in voltage of a stepped cantilever-type radio frequency(RF) micro electro-mechanical system(MEMS) switch is developed based on the Euler-Bernoulli beam and a modified couple stress theory, and is validated by comparison with the finite element results. The sensitivity functions of the pull-in voltage to the designed parameters are derived based on the proposed model. The sensitivity investigation shows that the pull-in voltage sensitivities increase/decrease nonlinearly with the increases in the designed parameters. For the stepped cantilever beam, there exists a nonzero optimal dimensionless length ratio, where the pull-in voltage is insensitive. The optimal value of the dimensionless length ratio only depends on the dimensionless width ratio, and can be obtained by solving a nonlinear equation. The determination of the designed parameters is discussed, and some recommendations are made for the RF MEMS switch optimization.

Key words: radio frequency(RF) micro electro-mechanical system(MEMS) switch, analytical solution, stepped cantilever beam, pull-in voltage, modified couple stress theory, sensitivity analysis

2010 MSC Number:

TN701
TN401

Junhua ZHU, Renhuai LIU. Sensitivity analysis of pull-in voltage for RF MEMS switch based on modified couple stress theory. Applied Mathematics and Mechanics (English Edition), 2015, 36(12): 1555-1568.

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References

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Sensitivity analysis of pull-in voltage for RF MEMS switch based on modified couple stress theory

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